K.A. Vorotilov - Dr.Sc. (Eng.), Professor, Director, REC «Technological Center», Moscow Technological University. Е-mail: vorotilov@mirea.ru A.V. Kornyukhin - Post-graduate Student, Department of Nanoelectronics, Moscow Technological University. Е-mail: d_seregin@mirea.ru S.A. Kurdyukov - Post-graduate Student, Department of Nanoelectronics, Moscow Technological University. Е-mail: d_seregin@mirea.ru D.S. Seregin - Ph.D. (Eng.), Head of Department, REC «Technological Center», Moscow Technological University. Е-mail: d_seregin@mirea.ru M.V. Starilov - Post-graduate Student, Department of Nanoelectronics, Moscow Technological University. Е-mail: d_seregin@mirea.ru