L.V. Lysenko1, D.M. Akhmelkin2, A.K. Gorbunov3, V.K. Shatalov4, N.A. Tikhonov5, A.E. Platonov6, K.S. Janaev7

1,2 JSC "Experimental Design Bureau of Microelectronics" (Kaluga, Russia)

3–7 Kaluga branch of Bauman Moscow State Technical University (National Research University) (Kaluga, Russia)

4 vkshatalov@yandex.ru