A.K. Gorbunov - Dr. Sc. (Phys.-Math.), Professor, Kaluga branch of the Bauman MSTU. E-mail: kf_mgtu_fiz@mail.ru A.P. Korzhavyi - Dr. Sc. (Eng.), Professor, Kaluga branch of the Bauman MSTU. E-mail: fn2kf@list.ru L.V. Lisenko - Dr. Sc. (Eng.), Professor, Kaluga branch of the Bauman MSTU. E-mail: baldprice@mail.ru A.L. Lisenko - Ph. D. (Eng.), Associate Professor, Kaluga branch of the Bauman MSTU. E-mail: baldprice@mail.ru V.K. Shatalov - Dr. Sc. (Eng.), Professor, Kaluga branch of the Bauman MSTU. E-mail: vkshatalov@yandex.ru

L.V. Lysenko1, D.M. Akhmelkin2, V.K. Shatalov3, A.K. Gorbunov4

1, 2 JSC "Experimental Design Bureau of Microelectronics" (Kaluga, Russia)
3, 4 Kaluga branch of Bauman Moscow State Technical University
(National Research University) (Kaluga, Russia)
1–4 vkshatalov@yandex.ru