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Articles by keyword double side lapping
The optimization of the mechanical surface processing technology of SiC wafers
V. V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg
V. N. Vyuginov - Ph.D. (Eng.), Director, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: mail@svetlana-ep.ru
N. K. Travin - Leading Engineer, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: travin@svetlana-ep.ru
The optimization of the mechanical surface processing technology of SiC wafers
V. V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg V. N. Vyuginov - Ph.D. (Phys.-Math.), Director, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: mail@svetlana-ep.ru N. K. Travin - Leading Engineer, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: travin@svetlana-ep.ru