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Articles by keyword химическое осаждение
FORMATION OF FERROELECTRIC HETEROSTRUCTURES WITH CONTROLLED NANOSTRUCTURES FOR MICRO- AND NANOELECTRONIC DEVICES
K.A. VOROTILOV, A.S. SIGOV, A.A. ROMANOV, P.R. MASHEVICH
NANOSTRUCTURES BEHAVIOUR OF FERROEELECTRIC STRUCTURES PREPARED BY DIFFERENT ANNEALING TEMPERATURES OF PZT LAYER
K.A. VOROTILOV, O.M. ZHIGALINA, D.S. SEREGIN
Nanoporous sol-gel silicate films
V.A. Vasiljev, D.S. Seregin, K.A. Vorotilov
Influence of process variable on properties of silicon nitride nano-thick films, deposited in inductively coupled plasma
A.E. Anurov, A.A. Danilov, A.A. Zhukov
Formation of Ferroelectric Heterostructures with Controlled Nanostructures for Micro- and Nanoelectronic Devices
K.A. Vorotilov, A.S. Sigov, A.A. Romanov, P.R. Mashevich