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Articles by keyword устройства на поверхностных акустических волнах
Layered structure on the basis of films of policluster diamond and AlN for the devices on surface acoustic waves
А.F. Belyanin - Dr.Sc. (Eng.), Professor, Chief Research Scientist, JSC CRTI «Technomash», JSC «Scientific Engineering Center «Technological Developments Of Telecommunication And Radio Frequency Identification» E-mail: belyanin@cnititm.ru A.S. Bagdasarian - Dr.Sc. (Eng.), Professor, Chief Research Scientist, JSC «Scientific Engineering Center «Technological Developments Of Telecommunication And Radio Frequency Identification», Kotelnikov Institute of Radio Engineering and Electronics of RAS
Preparation by RF-magnetron sputtering of aluminum nitride films for the devices on a surface acoustic wave
S.A. Bagdasaryan - Ph. D. (Eng.), General Director of JSC «Scientific Engineering Center «Technological Developments of Telecommunication and Radio Frequency Identification» (Moscow) E-mail: bagdassarian@mail.ru S.A. Nalimov - Leading Process Engineer, Central Research Technological Institute «Technomash» (Moscow) E-mail: belyanin@cnititm.ru V.V. Borisov - Leading Programmer, Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University E-mail: borvv1947@mail.ru N.I. Sushentsov - Ph. D. (Eng.), Associate Professor, Head of Department, Volga State University of Technology (Yoshkar-Ola) E-mail: sniyola@mail.ru