Journals
Books
Articles by keyword микросистемная техника
Formation of executive elements of microsystem technics devices by etching in inductive-connected plasma
A. E. Anurov, E. A. Grinkin, A. A. Zhukov
The quality test of dielectric layers of integrated circuits and products of microsystem engineering
V.V. Andreev, А.А. Stolyarov, D.S. Vasjutin, A.M. Mikhal'kov
The Quality Test of Dielectric Layers of Integrated Circuits and Products of Microsystem Engineering
V.V. Andreev, А.А. Stolyarov, D.S. Vasjutin, A.M. Mikhal'kov