V.S. Gurov - Dr. Sc. (Eng.), Professor, Head of the Department of Industrial Electronics, Rector of Ryazan State Radio Engineering University. E-mail: gurovvs@mail.ru
P.I. Kuksa - Student, Department General and Experimental Physics, Ryazan State Radio Engineering University. E-mail: kuksa_p@mail.ru

V.S. Gurov - Dr.Sc. (Eng.), Professor, Head of the Department of Industrial Electronics, Rector, Ryazan State Radio Engineering University. E-mail: gurovvs@mail.ru A.A. Trubitsyun - Dr.Sc. (Phys.-Math.), Professor, Department of Industrial Electronics, Ryazan State Radio Engineering University. E-mail: assur@bk.ru P.I. Kuksa - Student, Department of General and Experimental Physics, Ryazan State Radio Engineering University. E-mail: kuksa_p@mail.ru

V.S. Gurov - Dr. Sc. (Eng.), Professor, Rector of Ryazan State Radio Engineering University. E-mail: gurovvs@mail.ru A.A. Trubitsyn - Dr. Sc. (Phys.-Math.), Professor, Ryazan State Radio Engineering University. E-mail: assur@bk.ru E.Yu. Grachev - Ph. D. (Eng.), Associate Professor, Ryazan State Radio Engineering University. E-mail: monopol_rus@mail.ru

D.S. Manegin1, V.D. Sokolov2, O.P. Plotnikova3, E.V. Vorobev4, S.G. Ivakhnenko5

1-5 «SEC «Ion Plasma Technologies», BMSTU (Moscow, Russia)

1 manegin@bmstu.ru; 2 sokolovvd@bmstu.ru; 3 plotnikova@bmstu.ru; 4 evv@bmstu.ru; 5 ivakhnenko@bmstu.ru