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Journal Achievements of Modern Radioelectronics №6 for 2014 г.
Article in number:
Hyperboloid axisymmetric energy analyzer based on two ring-type electrodes
Keywords:
energy analyzer
electron optics
ion optics
energy analysis
hyperboloidelectrode systems
focusing systems
Authors:
V.S. Gurov - Dr. Sc. (Eng.), Professor, Head of the Department of Industrial Electronics, Rector of Ryazan State Radio Engineering University. E-mail: gurovvs@mail.ru
P.I. Kuksa - Student, Department General and Experimental Physics, Ryazan State Radio Engineering University. E-mail: kuksa_p@mail.ru
P.I. Kuksa - Student, Department General and Experimental Physics, Ryazan State Radio Engineering University. E-mail: kuksa_p@mail.ru
Abstract:
Currently technical progress develops giant strides, and primarily seen wide-spread use in electronics. If earlier RAM PC was a few kb, and now these figures reach in a few units, tens and hundreds of gigabytes. These and many other technologies have become possible with the latest technology, such as film. Their advantage is miniaturization boards and elements to them, as well as extremely high speed. To control the quality of the materials used, the deposited films surface analysis and analysis of production as such is used scanning equipment.
Examples of such equipment are Auger spectrometers, microprobe techniques of secondary ion mass spectrometry and etc. Most of these methods uses energy analyzers in complex analytical devices. Despite the fact that the roots of surface analysis leave in the middle of the XX century, the field of activity relevant as ever, constantly being new developments as separate analytical elements and whole analytical laboratories (which takes a long time).
This work is devoted to the development of an axisymmetric hyperboloid energy analyzer with two ring electrodes are discussed in detail obtained output parameters and their properties. This work is a continuation of research activities related to the study of the properties of hyperboloids, and opens new horizons for creating new and potentially effective analytical equipment.
Pages: 81-85
References
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