M.D. Vorobyev, O.Y. Maslennikov, D.N. Yudaev, E.D. Orlova, L.A. Solovyeva

M.D. Vorobyev, O.Y. Maslennikov, D.N. Yudaev, E.D. Orlova, L.A. Solovyeva

A.A. Kornyukhin

A.A. Kornyukhin - Deputy Head of Work, FSUE «SPE «Toriy», Moscow. E-mail: kornand76@mail.ru
A.V. Krylov - Bazovye technologii vacuumnyh priborov, Moscow. E-mail: alexeykrylov@inbox.ru
O.U. Maslennikov - Deputy General Director, Bazovye technologii vacuumnyh priborov, Moscow. E-mail: maslennikov_o@mail.ru
T.K. Sigalova - FSUE «SPE «Toriy», Moscow. E-mail: moi-adress2012@yandex.ru

A.A. Kornyukhin - Deputy Commander of Department, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: kornand76@mail.ru A.V. Krylov - Head of Department, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: wings@prov.ru O.Yu. Maslennikov - Dr. Sc. (Eng.), Professor, Deputy General Director, «Vacuum devicesbasic technologies» Ltd (Moscow). E-mail: maslennikov_o@mail.ru M.A. Tokaev - Deputy General Director, Kazan plant of precise mechanical engineering. E-mail: kztm-msk@yandex.ru

N.Ya. Rukhlyada1, V.P. Marin2

1 National Research Nuclear University "MEPHI" (Moscow, Russia)
2 MIREA – Russian University of Technology (Moscow, Russia)