Journals
Books
Articles by keyword Плазмохимическое травление
O.R. Abdullaev - Pd. Sc. (Eng.), Director of Science and Production, JSC «Optron». E-mail: abd@optron.ru
E.S. Rogovskiy - Senior Engineer, JSC «Optron». E-mail: skb-optron@mail.ru
M.Yu. Filatov - Ph.D. (Eng.), Vice-Director of Design Department, JSC «Optron». E-mail: skb-optron@mail.ru
E.S. Rogovskiy - Senior Engineer, JSC «Optron». E-mail: skb-optron@mail.ru
M.Yu. Filatov - Ph.D. (Eng.), Vice-Director of Design Department, JSC «Optron». E-mail: skb-optron@mail.ru
V.Ya. Shanygin - Senior Engineer, Saratov branch of Kotelnikov IRE RAS. E-mail: vitairerun@mail.ru
R.K. Yafarov - Dr.Sc. (Eng.), Head of Laboratory, Saratov branch of Kotelnikov IRE RAS
S.Yu. Suzdaltsev - Ph.D. (Eng.), Senior Research Scientist, Saratov branch of Kotelnikov IRE RAS
D.V. Nefedov - Ph.D. (Eng.), Research Scientist, Saratov branch of Kotelnikov IRE RAS
G.R. Sagatelyan1, K.N. Bugorkov2, A.B. Solomashenko3, A.S. Kuznetsov4
1–4 Bauman Moscow State Technical University (National Research University) (Moscow, Russia)