Journals
Books
Articles by keyword ВЧ-плазма
TECHNOLOGICAL FEATURES OF RF-PLASMA VACUUM FLUOROPOLYMER FILMS FORMATION AND THEIR STRUCTURAL AND ELECTRICAL PROPERTIES
P. A. Luchnikov, A. A. Rogachev, A. S. Vishnevskiy, A. P. Luchnikov, V. M. Berezin
Dependence of electroconductivity a-Si:H/c-Si structures on preliminary plasma treatment of single-crystalline silicon
D.V. Nefedov - Ph.D. (Eng.), Researcher, Saratov branch of the Kotel-nikov Institute of Radio Engineering, and Electronics Russian Academy of Sciences. E-mail: nefedov_dv@rambler.ru
S.Y. Suzdaltsev - Ph.D. (Eng.), Senior Researcher, Saratov branch of the Kotel-nikov Institute of Radio Engineering, and Electronics Russian Academy of Sciences
Composition of silicon-carbonic of domains on crystals of silicon (100)
V.Ya. Shanygin - Senior Engineer, Saratov branch of Kotelnikov IRE RAS. E-mail: vitairerun@mail.ru R.K. Yafarov - Dr.Sc. (Eng.), Head of Laboratory, Saratov branch of Kotelnikov IRE RAS S.Yu. Suzdaltsev - Ph.D. (Eng.), Senior Research Scientist, Saratov branch of Kotelnikov IRE RAS D.V. Nefedov - Ph.D. (Eng.), Research Scientist, Saratov branch of Kotelnikov IRE RAS
Making of planar-butt field emission structures on silicon and investigation their characteristics
D.V. Nefedov - Ph.D. (Eng.), Researcher, Saratov Branch of the Kotel-nikov Institute of Radio Engineering and Electronics Russian Academy of Science E-mail: nefedov_dv@rambler.ru S.Y. Suzdaltsev - Ph.D. (Eng.), Senior Research Scientist, Saratov Branch of the Kotel-nikov Institute of Radio Engineering and Electronics Russian Academy of Science V.Y. Shanygin - Senior Engineer, Saratov Branch of the Kotel-nikov Institute of Radio Engineering and Electronics Russian Academy of Science R.K. Yafarov - Dr.Sc. (Eng.), Professor, Head of the Laboratory, Saratov Branch of the Kotel-nikov Institute of Radio Engineering and Electronics Russian Academy of Science