Journals
Books
Articles by keyword ion-beam sputtering
Structure of SiC and C nano-sized films on Si substrates synthesised by magnetron and ion-beam target sputtering
I.K. Beysembetov, K.Kh. Nusupov, N.B. Beysenkhanov, S.K.Zharikov, B.K. Kenzhaliev, T.K. Akhmetov, R. Ivlev
Ways to improve of design and technology manufacturing cathodes for magnetron short-wave part of milimeter waveband
V.S. Polyakov - Head of Laboratory, JSC «Pluton» (Moscow), Post-graduate Student, MATI-RSUAT (Moscow). E-mail: p_vs@list.ru
A.D. Silaev - Head of Laboratory, JSC «Pluton» (Moscow), Post-graduate Student, MATI-RSUAT (Moscow). E-mail: silaev_ad@mail.ru
N.E. Ledentсova - Engineer, JSC «Pluton» (Moscow), Post-graduate Student, MIEM NRU HSE (Moscow). E-mail: nekharitonova@mail.ru
I.P. Lee - Ph. D. (Eng.), Head of Department, JSC «Pluton» (Moscow). E-mail: ork@pluton.msk.ru
А.А. Lozovan - Dr. Sc. (Eng.), Professor, Head of Department, MATI-RSUAT (Moscow). E-mail: loz-plasma@yandex.ru
Formation of strained and highly doped germanium layers
R.I. Batalov - Ph.D. (Phys.-Math.), Senior Research Scientist, E.K. Zavoyskii Kazan Physical-Technical Institute of RAS E-mail: batalov@kfti.knc.ru R.M. Bayazitov - Dr.Sc. (Phys.-Math.), Leading Research Scientist, E.K. Zavoyskii Kazan Physical-Technical Institute of RAS, Kazan State Power Engineering University E-mail: batalov@kfti.knc.ru I.A. Faizrakhmanov - Dr.Sc. (Phys.-Math.), Chief Research Scientist, E.K. Zavoyskii Kazan Physical-Technical Institute of RAS E-mail: batalov@kfti.knc.ru G.D. Ivlev - Ph.D. (Phys.-Math.), Senior Research Scientist, Belarussian State University, Minsk, Belarus