Journals
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Articles by keyword sol-gel techniques
SOL-GEL MESOPOROUS SILICATES FOR VLSI MULTILEVEL INTERCONNECTIONS AND MEMS TECHNOLOGY
V. A. Vasiljev, D. S. Seregin, K. A. Vorotilov
The capacitance - voltage characteristics of planar nanostructures based on ferroelectric films
E.A. Gorbunov, P.P. Lavrov, V.A. Pershin, D.S. Seregin, I.A. Khabarov