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Articles by keyword ring magnetron
Features of magnetron sputtering of internal spherical surfaces

G.R. Sagatelian1, A.V. Shishlov2, M.N. Bilinkin3

1 Bauman Moscow State Technical University (Moscow, Russia)

2,3 Division of JSC TsENKI – "Kuznetsov research institute of applied mechanics"

Formation of non-uniformity of coating thickness when sprayed with annular magnetrons on planetary installations

H.R. Sagatelyan1, S.Yu. Novikov2, M.N. Bylinkin3, A.V. Shishlov4

1,2,4 Bauman Moscow State Technical University (Moscow, Russia)
3 Branch of JSC CENKI "NIIPM named after Academician V.I. Kuznetsov" (Moscow, Russia)
1 h _sagatelyn@maul. ru, 2 chyjd@yandex.ru, 3 bylinkin5858@mail.ru, 4 orange_a@list.ru