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Articles by keyword film AlN
Preparation by RF-magnetron sputtering of aluminum nitride films for the devices on a surface acoustic wave
S.A. Bagdasaryan - Ph. D. (Eng.), General Director of JSC «Scientific Engineering Center «Technological Developments of Telecommunication and Radio Frequency Identification» (Moscow) E-mail: bagdassarian@mail.ru S.A. Nalimov - Leading Process Engineer, Central Research Technological Institute «Technomash» (Moscow) E-mail: belyanin@cnititm.ru V.V. Borisov - Leading Programmer, Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University E-mail: borvv1947@mail.ru N.I. Sushentsov - Ph. D. (Eng.), Associate Professor, Head of Department, Volga State University of Technology (Yoshkar-Ola) E-mail: sniyola@mail.ru