S.N. Novikov – Ph. D. (Eng.), Leader Research Scientist, Institute nano- and the microsystem equipment,
National Research University of Electronic Technology (MIET) (Moscow, Zelenograd) E-mail: aviary@mail.ru
A.I. Ermolaeva – Ph. D. (Eng.), Associate Professor, Institute nano- and the microsystem equipment,
National Research University of Electronic Technology (MIET) (Moscow, Zelenograd)
V.A. Zhigalov – Ph. D. (Eng.), Engineer, Institute nano- and the microsystem equipment,
National Research University of Electronic Technology (MIET) (Moscow, Zelenograd) E-mail: zhigalov@gmail.com
N.E. Korobova – Dr. Sc. (Chem.), Professor, Leader Research Scientist, Institute nano- and the microsystem equipment National Research University of Electronic Technology (MIET) (Moscow, Zelenograd) E-mail: korobova3@mail.ru