M.S. Lapteva1, A.V. Gorbatova2, P.Yu. Avdeev3, D.A. Abdullaev4, A.I. Kartsev5, E.A. Bulavintseva6, A.A. Klimov7, A.M. Buryakov8

1–3, 5–8 MIREA – Russian Technological University (Moscow, Russia)
4 Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Moscow, Russia)
5 RUDN University (Moscow, Russia)
7 Kotelnikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences ((Moscow, Russia)
1 lapteva@mirea.ru, 2 gorbatova@mirea.ru, 3 avdeev_p@mirea.ru, 4 abdullaev.d@inme-ras.ru, 5 karec1@gmail.com, 6 bulavinceva@mirea.ru, 7 klimov@mirea.ru, 8 buryakov@mirea.ru