L.V. Lysenko1, D.M. Akhmelkin2, V.K. Shatalov3, N.A. Tikhonov4, A.E. Platonov5, A.E. Petrunin6

1,2 JSC "Experimental Design Bureau of Microelectronics" (Kaluga, Russia)

3–6 Kaluga branch of the Bauman MSTU (Kaluga, Russian)

3 vkshatalov@yandex.ru