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Articles by keyword травления
Plasma-chemical etching of quartz glass by sulfur hexafluoride

G.R. Sagatelyan1, K.N. Bugorkov2, A.B. Solomashenko3, A.S. Kuznetsov4

1–4 Bauman Moscow State Technical University (National Research University) (Moscow, Russia)
 

Reduction of radiation defects in MIS structures using a multilayer resist based on a refractory metal

N.V. Cherkesova1, G.A. Mustafaev2, A.G. Mustafaev3

1,2 Kabardino-Balkarian State University, (Nalchik, Russia)
3 Dagestan State University of National Economy (Makhachkala, Russia)
1 natasha07_2002@mail.ru, 2 zoone@mail.ru, 3 arslan_mustafaev@mail.ru