N.M. Ushakov - Dr. Sc. (Phys.-Math.), Head of Laboratory of Submicron Electronics, Saratov branch of Kotel\'nikov IRE of RAS; Professor, Department «Electronics and telecommunications», Yuri Gagarin State Technical University of Saratov E-mail: nmu@bk.ru V.Ya. Podvigalkin - Ph. D. (Eng.), Leading Engineer, Laboratory of Submicron Electronics, Saratov branch of Kotel\'nikov IRE of RAS E-mail: podvigalkin@ya.ru I.D. Kosobudskii - Dr. Sc. (Chem.), Leading Research Scientist, Laboratory of Submicron Electronics, Saratov branch of Kotel\'nikov IRE of RAS; Professor, Department of Chemistry, Yuri Gagarin State Technical University of Saratov E-mail: ikosobudskyi@gmail.com

N.M. Ushakov - Dr. Sc. (Phys.-Math.), Head of Laboratory of Submicron Electronics, Saratov branch of Kotel\'nikov IRE of RAS; Professor, Department «Electronics and telecommunications», Yuri Gagarin State Technical University of Saratov E-mail: nmu@bk.ru I.D. Kosobudsky - Dr. Sc. (Chem.), Leading Research Scientist, Laboratory of Submicron Electronics, Saratov branch of Kotel\'nikov IRE of RAS; Professor, Department of Chemistry, Yuri Gagarin State Technical University of Saratov E-mail: ikosobudskyi@gmail.com V.Ya. Podvigalkin - Ph. D. (Eng.), Leading Engineer, Laboratory of Submicron Electronics, Saratov branch of Kotel\'nikov IRE of RAS E-mail: podvigalkin@ya.ru

S.Yu. Molchanov – Post-graduate Student, Department «Electronics and telecommunications», Yuri Gagarin State

Technical University of Saratov

E-mail: canishe@yandex.ru

N.M. Ushakov – Dr. Sc. (Phys.-Math.), Head of Laboratory of Submicron Electronics, Saratov branch of Kotel'nikov

IRE of RAS

E-mail: nmu@bk.ru

I.D. Kosobudsky – Dr. Sc. (Chem.), Leading Research Scientist, Laboratory of Submicron Electronics, Saratov branch of Kotel'nikov IRE of RAS; Professor, Department of Chemistry, Yuri Gagarin State Technical University of Saratov E-mail: ikosobudskyi@gmail.com