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Articles by keyword стехиометрический состав
Method for the formation of thin films with a given stoichiometric distribution of the composition over the thickness

A.E. Komlev1, V.A. Volpyas2, R.A. Platonov3, A.G. Altynnikov4, A.B. Kozyrev5

St. Petersburg Electrotechnical University “LETI”, St. Petersburg, Russia