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Articles by keyword растровый электронный микроскоп
Method for determining the scan nonlinearity of scanning electron microscopes
V.B. Mityuhlyaev - Ph. D. (Phys.-Math.), Head of Department, АО «NICPV» (Moscow) E-mail: fgupnicpv@mail.ru S.S. Antsyferov - Dr. Sc. (Eng.), Professor, Moscow Technological University (MIREA) E-mail: c_standard@fel.mirea.ru V.G. Maslov - Post-graduate Student, Moscow Technological University (MIREA); Engineer, АО «NICPV» (Moscow) E-mail: monty-49@mail.ru