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Articles by keyword пленки молибдена
Influence of process conditions of magnetron sputtering on the mechanical stresses and surface roughness of molybdenum films
V.N. Zima - Ph.D. (Eng.), Leading Research Scientist, PJSC «ONIIP». E-mail: info@oniip.ru
T.N. Tanskaya - Junior Research Scientist, PJSC «ONIIP». E-mail: info@oniip.ru