A.K. Gorbunov - Dr. Sc. (Phys.-Math.), Professor, Kaluga branch of the Bauman MSTU. E-mail: kf_mgtu_fiz@mail.ru A.P. Korzhavyi - Dr. Sc. (Eng.), Professor, Kaluga branch of the Bauman MSTU. E-mail: fn2kf@list.ru L.V. Lisenko - Dr. Sc. (Eng.), Professor, Kaluga branch of the Bauman MSTU. E-mail: baldprice@mail.ru A.L. Lisenko - Ph. D. (Eng.), Associate Professor, Kaluga branch of the Bauman MSTU. E-mail: baldprice@mail.ru V.K. Shatalov - Dr. Sc. (Eng.), Professor, Kaluga branch of the Bauman MSTU. E-mail: vkshatalov@yandex.ru

A.P. Korzhavyi - Dr. Sc. (Eng.), Professor, Kaluga branch of the Bauman MSTU. E-mail: fn2kf@list.ru L.V. Lisenko - Dr. Sc. (Eng.), Professor, Kaluga branch of the Bauman MSTU. E-mail: baldprice@mail.ru V.K. Shatalov - Dr.Sc. (Eng.), Professor, Kaluga branch of the Bauman MSTU. E-mail: vkshatalov@yandex.ru A.K. Gorbunov - Dr. Sc. (Phys.-Math.), Professor, Kaluga branch of the Bauman MSTU. E-mail: kf_mgtu_fiz@mail.ru A.L. Lisenko - Ph. D. (Eng.), Associate Professor, Kaluga branch of the Bauman MSTU. E-mail: kf_mgtu_fiz@mail.ru

L.V. Lysenko1, V.K. Shatalov2, A.K. Gorbunov3

1–3 Kaluga branch of the Bauman MSTU (Kaluga, Russian)

2 vkshatalov@yandex.ru

L.V. Lysenko1, D.M. Akhmelkin2, V.K. Shatalov3, N.A. Tikhonov4, A.E. Platonov5, A.E. Petrunin6

1,2 JSC "Experimental Design Bureau of Microelectronics" (Kaluga, Russia)

3–6 Kaluga branch of the Bauman MSTU (Kaluga, Russian)

3 vkshatalov@yandex.ru