V.V. Kurganov¹, V.I. Djigan²

1 National Research University of Electronic Technology «MIET» (Moscow, Zelenograd, Russia)

2 The Institute for Design Problems in Microelectronics of the Russian Academy of Sciences  (Moscow, Zelenograd, Russia)

O. S. Litvinov – Dr.Sc. (Phys.-Math.), Professor, Department of Physics, Bauman Moscow State Technical University

E-mail: oleglitv@mtu-net.ru

B. E. Vintaykin – Dr.Sc. (Phys.-Math.), Professor, Department of Physics, Bauman Moscow State Technical University

E-mail: vintaikb@mail.ru

V. S. Boruta – Ph.D. (Eng.), Associate Professor, Department of Physics, Bauman Moscow State Technical University

E-mail: borutav@mail.ru

A. I. Ermakov – Student, Department of Physics, Bauman Moscow State Technical University

E-mail: arsmsk@yandex.ru