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Articles by keyword гексафторид серы
Plasma-chemical etching of quartz glass by sulfur hexafluoride

G.R. Sagatelyan1, K.N. Bugorkov2, A.B. Solomashenko3, A.S. Kuznetsov4

1–4 Bauman Moscow State Technical University (National Research University) (Moscow, Russia)
 

Analysis of high-frequency discharge during plasma chemical etching of quartz glass with sulfur hexafluoride

D.I. Yaminsky1, S.M.Panova2, I.V. Yaminsky3

1–3 Lomonosov Moscow State University (Moscow, Russia)
2,3 Advanced Technologies Center (Moscow, Russia)
1 y@sinno.ru, 2 serafima.panova@student.physchem.msu.ru, 3 yaminsky@nanoscopy.ru