O.V. Somonova, A.V. Madzhuga, A.L. Elizarova

V.A. Dmitrichenko - Junior Researcher, TechnoMicron LTD (Moscow). E-mail: dmitrichenko@aetechnologies.ru
T.S. Kumskova - Junior Researcher, TechnoMicron LTD (Moscow). E-mail: kumskova@aetechnologies.ru

A.V. Belousov - Ph.D. (Phys.-Math.), Associate Professor, Faculty of Physics, Lomonosov Moscow State University, E-mail: belousovav@physics.msu.ru A.A.Belianov - Junior Research Scientist, Faculty of Physics, Lomonosov Moscow State University G.A.Krusanov - Post-graduate Student, Faculty of Physics, Lomonosov Moscow State University. E-mail: krusa-nov@physics.msu.ru A.P. Chernyaev - Dr.Sc. (Phys.-Math.), Professor, Head of Department, Faculty of Physics, Lomonosov Moscow State University

I.V. Pronin¹, M.I. Shcherbakov²

1 LLC “Biopharm” (Nizhny Novgorod, Russia);

2 LLC “IRTIS” (Moscow, Russia)

I.V. Pronin

LLC “Biopharm” (Nizhny Novgorod, Russia)

V.N. Makarov1, N.A. Boos2

1,2 MIREA – Russian Technological University (Moscow, Russia)

1 Firm "TECHNOSVET" LLC (Moscow, Russia)