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Articles by keyword ионопучковая диагностика
Technological control of element structure perovskite layer of planar nano structures deposited in HF-plasma
M.S. Afanas-ev, V.K. Egorov, P.A. Lychnikov, A.V. Byrov, G.V. Chucheva
Technological control of element structure perovskite layer of planar nano structures deposited in HF-plasma
M.S. Afanas-ev V.K Egorov, P.A.Lychnikov, A.V.Byrov, G.V. Chucheva