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Articles by keyword Плазма высокочастотного разряда
Calculation of electromagnetic field of spiral antenna of plasma chemical etching unit

H.R. Sagatelyan – 

Dr. Sc. (Eng.), Professor, Bauman Moscow State Technical University 

E-mail: h_sagatelyan@mail.ru

I.Yu. Grachev

Student, Bauman Moscow State Technical University 

E-mail: soweo8@gmail.com

K.N. Bugorkov – 

Deputy Head of Technological Department, V.I. Kuznetsov Research Institute of Applied Mechanics

E-mail: Milan85@yandex.ru

N.V. Fedorkova – 

Ph.D. (Eng.), Associate Professor, Bauman Moscow State Technical University

E-mail: k_rl6@bmstu.ru