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Technolgical aspects of creating the AlN biological sensor based on surface acoustic waves
I.I. Bobrinetskii - Dr.Sc.(Eng.), Senior Research Scientist, Scientific Educational Center «Probe Microscopy and Nanotechnology» National Research University of Electronic Technology (MIET) (Zelenograd, Moscow)
K.K. Lavrentyev - Student, National Research University of Electronic Technology (MIET) (Zelenograd, Moscow)
M.V. Mezentseva - Dr.Sc.(Biol.), Head of the Laboratory of Cell Cultures, Federal State Institution D. I. Ivanovskiy Institute of Virology Russian Ministry of Health
V. K. Nevolin - Dr.Sc.(Phys.-Math.), Professor, Chief Researcher, National Research University of Electronic Technology (MIET) (Zelenograd, Moscow)
L.I. Russu - Research Scientist, Cell Cultures of Federal State Institution D. I. Ivanovskiy Institute of Virology Russian Ministry of Health
I.A. Suetina - Ph.D.(Biol.), Senior Research Scientist, Federal State Institution D. I. Ivanovskiy Institute of Virology Russian Ministry of Health
K. A. Tsarik - Ph.D.(Eng.), Lead Process Engineer, Scientific Educational Center «Probe Microscopy and Nanotechnology» National Research University of Electronic Technology (MIET) (Zelenograd, Moscow)