A.D. Maslov – Junior Research Scientist, 

Department «Micro- and nanoelectronics», Ryazan State Radio Engineering University named after V.F. Utkin E-mail: Maslov.a.d@mail.ru

N.V. Vishnyakov – Ph.D.(Eng.), Associate Professor, 

Department «Micro- and nanoelectronics», Ryazan State Radio Engineering University named after V.F. Utkin

E-mail: rcpm-rgrtu@yandex.ru; rcpm@rsreu.ru