V.K. Egorov - Ph.D. (Phys.-Math.), Senior Research Scientist, Institute of MicroTechnology RAS, Moscow - Chernogolovka, Russia. E-mail: egorov@iptm.ru E.V. Egorov - Junior Research Scientist, Institute of MicroTechnology RAS, Moscow - Chernogolovka, Russia. E-mail: hed1317@mail.ru M.S. Afanas'ev - Ph.D. (Eng.) , Senior Research Scientist, Fryasino branch of Institute of Radiotechnics and Electronics RAS, Moscow- Fryazino, Russia. E-mail: michaela2005@yandex.ru E.M. Loukianchenko - Ph.D. (Phys.-Math.), Scientist Lider of Firm «Polus», Sankt-Peterburg, Russia. E-mail: emluk@mail.ru