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Articles by keyword ионное легирование
Influence of quality thin dielectric films on the reliability of integrated circuits
O.N. Glotova - Student, Kaluga branch of the Bauman MSTU. E-mail: luckyfox13@mail.ru S.A. Adarchin - Ph. D. (Eng.), Associate Professor, Kaluga branch of the Bauman MSTU. E-mail: drach@kaluga.org