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V.V. Kurganov¹, V.I. Djigan²
1 National Research University of Electronic Technology «MIET» (Moscow, Zelenograd, Russia)
2 The Institute for Design Problems in Microelectronics of the Russian Academy of Sciences (Moscow, Zelenograd, Russia)
V.I. Djigan
Institute for Design Problems in Microelectronics of RAS (Zelenograd, Moscow, Russia)