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Articles by keyword высоковольтный транзистор
Features of the manufacturing process for power ICs with submicron design standards

S.N. Kuznetsov1, A.N. Mansurov2, A.S. Mokeev3, S.D. Serov4, T.A. Shobolova5, E.L. Shobolov6, S.I. Surodin7, N.S. Shirokikh8

1–8 FSUE RFNC «All-Russian Research Institute of Experimental Physics» (Sarov, Russia)
1 selenk@yandex.ru, 2 mansanton.1@gmail.com, 3 mokeev.alexander@gmail.com, 4 izergz@gmail.com, 5 shobolova.ta@mail.ru, 6 eshobolov@niiis.nnov.ru, 7 ssurodin@niiis.nnov.ru, 8 shirokikhnikita1@yandex.ru