Journals
Books
Articles by keyword ВЧ-магнетронное распыление
D.M. Dolginzev - Research Engineer, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: thphys@herzen.spb.ru
A.G. Kanareikin - Post-Graduate Student, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: thphys@herzen.spb.ru
V.P. Pronin - Dr.Sc. (Phys.-Math.), Professor, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: thphys@herzen.spb.ru
E.Yu. Kaptelov - Dr.Sc. (Phys.-Math.), Senior Research Scientist, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: Kaptelov@mail.ioffe.ru
S.V. Senkevich - Dr.Sc. (Phys.-Math.), Research Scientist, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: SenkevichSV@mail.ioffe.ru
I.P. Pronin - Dr.Sc. (Phys.-Math.), Senior Research Scientist, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: Petrovich@mail.ioffe.ru