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Articles by keyword углеродная пленка
Structure of SiC and C nano-sized films on Si substrates synthesised by magnetron and ion-beam target sputtering
I.K. Beysembetov, K.Kh. Nusupov, N.B. Beysenkhanov, S.K.Zharikov, B.K. Kenzhaliev, T.K. Akhmetov, R. Ivlev