Journals
Books
Articles by keyword геттеры
Nanostructured TiV getter coatins
S.P. Timoshenkov - Dr. Sc. (Eng.), Professor, Head of Microelectronics Department, National Research University of Electronic Technology (MIET) (Moscow, Russia). E-mail: spt@miee.ru
D.S. Gaev - Ph.D. (Eng.), Associate Professor, Kabardino-Balkarian State University (KBSU) (Nalchik, Russia). E-mail: dahir@mail.ru
A.N. Boyko - Ph.D. (Eng.), Associate Professor, Microelectronics Department, National Research University of Electronic Technology (MIET) (Moscow, Russia). E-mail: ant_nico@mail.ru
R.R. Galiullin - Ph.D. (Eng.), Kabardino-Balkarian State University (KBSU) (Nalchik, Russia). E-mail: svd5555@mail.ru