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Articles by keyword Комплексная локальная диагностика тонкопленочных структур
N.V. Vishnyakov – Ph.D.(Eng.), Associate Professor,
Department «Micro- and nanoelectronics», Ryazan State Radio Engineering University named after V.F. Utkin E-mail: rcpm-rgrtu@yandex.ru; rcpm@rsreu.ru
S.P. Vikhrov – Honored Scientist of RF, Dr.Sc.(Phys.-Math.), Professor, Main Research Scientist, SRI «Foton» of Ryazan State Radio Engineering University named after V.F. Utkin
E-mail: vikhrovsergey@mail.ru
N.M. Tolkach – Ph.D.(Phys.-Math.), Junior Research Scientist, Institute of Advanced Materials and Technologies of MIET Е-mail: n.m.tolkach@gmail.com