V.K. Doroshevich

Complex physicotechnical examination (ФТЭ) of microcircuits consists in a system estimation of quality of their designing and manufacturing by physicotechnical methods. The purpose of examination  revealing (with the purpose of elimination) lacks of designing and manufacture microcircuits, an estimation of their quality and reliability without carrying out of labour-consuming and expensive tests. Operative definition of physical condition microcircuits at all stages of their life cycle. Physical condition microcircuits and preconditions to refusals can be to the full determined at the control of parameters over revealing latent defects and carrying out physicotechnical examination, allowing to estimate quality of design microcircuits, elements of its structure, distribution of potentials, electric loadings. The route of carrying out of physicotechnical examination is developed, provides diagnostics on external conclusions, quality assurance of the case and assembly operations, quality assurance of a crystal. Principles of formation of route ФТЭ: 1. Inclusion in a route of methods, the most informative for given type ИС. 2. Prevalence of active methods of researches above passive with the purpose of revealing the greatest quantity of latent defects. 3. Prevalence of not destroying test methods above destroying with the purpose of minimization of number ИС, required for carrying out ФТЭ. Techniques of quality assurance of elements and structures microcircuits are resulted in the Appendix to РД 22.12.174 «Microcircuits integrated. The order and methods of carrying out of physicotechnical examination at an estimation of quality».