A.A. Kondrashin1, A.N. Lyamin2, A.V. Savkin3

1–3 Institute № 12, Federal state-funded educational institution of the higher education "The Moscow aviation institute (the national research university)" (Moscow, Russia)

At present, in the modern production of micro- and nano-electronics, there is a significant need both for a tool for influencing individual molecules (or groups of molecules), and for precision control associated with the movement of atoms in molecules, for example, in chemical processes. reactions. In this regard, it is necessary to consider the possibility and practical implementation of the transition from nano-, pico-, femtosecond durations of laser radiation pulses to attosecond ones.

Purpose – to analyze the state of introduction of lasers with attosecond pulses into production for the manufacture of nanoelectronic devices.

An analysis of modern methods for obtaining attoseconds of laser pulses, including the generation of high-order harmonics HHG / HHG (High Harmonic Generation), was carried out. The state of developments in the manufacture of lasers with attosecond pulses is substantiated.

The possibilities and state of the art of obtaining attosecond laser pulses for their application in nanoelectronics are shown.

Kondrashin A.A., Lyamin A.N., Savkin A.V. Prospects of development additive 3D technologies for production products of the electronic equipment. Nanotechnology: the development, application – XXI Century. 2022. V. 14. № 3. Р. 56−61. DOI: https://doi.org/10.18127/ j22250980-202203-07 (In Russian)

1. Keller U. Ultrafast solid-state laser oscillators: a success story for the last20 years with no end in sight. Appl. Phys. B. 2010. V. 100. P. 15. https://doi.org/10.1007/s00340-010-4045-3
2. Emelin M.Yu. Osnovy attosekundnoy fiziki (elektronnoye posobiye). N. Novgorod: Nizhegorodskoy gosudarstvennyy universitet im. Lobachevskogo. 2014. 52 s. (in Russian).
3. Lyanpin Kh., Mokhsin Kh., Dzhon Kh. Sinkhronizatsiya mod i chastotnoye smeshivaniye pri chastote povtoreniya impulsov v TGts v lazere s sinkhronizatsiyey mod s diskretnoy reshetkoy DBR. Optics Express. 2014. V. 22. Iss. 18. P. 21690–21700. (in Russian).
4. Katalog produktsii kompanii Trumpf [Elektronnyy resurs]. https://www.trumpf.com/ru_RU/produkcija/laser/lazer-euv-drive/ (opublikovano:2022) (data obrashcheniya: 06.06.2022). (in Russian).
5. McPherson A., Gibson G., Jara H. et al. Studies of multiphoton production of vacuum-ultraviolet radiation in the rare gases. J. Opt. Soc. Am. B. 1987. V. 4. № 4. P. 595–601.
6. Ferray M., L’Huillier A., Li X.F. et al. Multiple-harmonic conversion of 1064 nm radiation in rare gases. J. Phys. B: At. Mol. Opt. Phys. 1988. V. 21. № 2. P. L31–L35.
7. Attosekundnaya tekhnologiya: dlitelnost impulsa vidimogo sveta sostavlyayet vsego 380 attosekund [Elektronnyy resurs] https://www.laserfocusworld.com/lasers-sources/article/16547115/attosecond-technology-visiblelight-pulses-are-only-380-attosecondslong (opublikovano: 2016) (data obrashcheniya: 20.06.2022)