350 rub
Journal Nanotechnology : the development , application - XXI Century №1 for 2009 г.
Article in number:
Application of Gas Cluster Ions in Nanotechnology
Keywords:
Authors:
A.A. Andreev, Y.A. Ermakov, A.S. Patrakeev, V.S. Chernysh
Abstract:
The history of researches connected with gas cluster ion beam development is briefly reviewed. Equipments for researches of gas cluster ions interaction with solids were described. Processes of gas cluster ion collisions with solids were compared with monomer ion impact. These processes for clusters were shown to be very different from monomer ion bombardment. A unique possibilities of gas cluster ions for surface smoothing, low shallow implantation and ion beam assisted deposition of thin films were demonstrated
Pages: 23-39
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