Noncontact method of measuring the conductivity of thin films

B.D. Zaitsev; A.A. Teplykh; A.M. Shihabudinov; I.E. Kuznetsova

Noncontact method of measuring the conductivity of thin films

B.D. Zaitsev¹, A.A. Teplykh², A.M. Shihabudinov³, I.E. Kuznetsova⁴

research article Pages: 60-61

¹ Dr.Sc. (Phys.-Math.), Head of Laboratory, Kotelnikov IRE RAS (Saratov Branch)
² Ph.D. (Phys.-Math.), Senior Researcher, Kotelnikov IRE RAS (Saratov Branch)
³ Ph.D. (Phys.-Math.), Researcher, Kotelnikov IRE RAS (Saratov Branch)
⁴ Dr.Sc. (Phys.-Math.), Leading Researcher, Kotelnikov IRE RAS

Keywords: acoustic waves in the plates non-destructive measurement

Abstract

The non-contact method of measuring the conductivity of thin films by means of delay lines SH0 waves made on the basis of Y-cut lithium niobate plate is developed. It has been found that at the location above the delay line between the interdigital transducer (IDT) of the dielectric plate with thin conductive film phase of the output signal substantially changes, the degree of change decreases with increasing width of the gap between them. The conductivity of the studied films varied from 1 S to 1 µS.

How to cite

Зайцев Б.Д., Теплых А.А., Шихабудинов А.М., Кузнецова И.Е. Бесконтактный метод измерения проводимости тонких пленок // Нелинейный мир. 2015. № 2. С. 60–61.

References

Kuznetsova I.E., Zaitsev B.D., Anisimkin V.I., Teplykh A.A., Shikhabudinov A.M., Kolesov V.V., Yakunin V.G. Noncontact determination of thin films conductance by the SH₀ plate acoustic waves // Journal of Applied Physics. 2014. V. 115. №4. 044504.
Borodina I.A., Zaitsev B.D. Kuznetsova I.E. Acoustic Waves in a Structure Containing Two Piezoelectric Plates Separated by an Air (Vacuum) Gap // Trans. on Ultrason., Ferroel. and Freq. Control. 2013. V. 60. №12. P. 2677-2681.

[1] Kuznetsova I.E., Zaitsev B.D., Anisimkin V.I., Teplykh A.A., Shikhabudinov A.M., Kolesov V.V., Yakunin V.G. Noncontact determination of thin films conductance by the SH₀ plate acoustic waves // Journal of Applied Physics. 2014. V. 115. №4. 044504.

[2] Borodina I.A., Zaitsev B.D. Kuznetsova I.E. Acoustic Waves in a Structure Containing Two Piezoelectric Plates Separated by an Air (Vacuum) Gap // Trans. on Ultrason., Ferroel. and Freq. Control. 2013. V. 60. №12. P. 2677-2681.