The measurement procedure of parameters of nanoscale objects

In article methods of verification of the optical profilometr model «NEOX» for the purposes of type approval is presented. Optical pro-filometers can be used as measuring tools for the study of nanostructured objects and allow you to determine the linear parameters of the nanoobjects, to explore the texture, surface irregularity and surface unsoundness. In accordance with the recommendation for preparation, execution and review of test materials measuring instruments for the type approval, one of the main developed documents is the method of verification of measuring instruments. This methods was developed in accordance with RMG 51-2002 «Documents for verification methods of measuring instruments. Basic statements» and apply to optical profilometers, establishes the methods and instruments of their initial and periodic verifications.