Effect of mollecular additives on interior stress decrease in nanostructured sol-gel PZT films

P.Р. Lavrov; A.V. Kornyukhin

Effect of mollecular additives on interior stress decrease in nanostructured sol-gel PZT films

P.Р. Lavrov¹, A.V. Kornyukhin²

research article Pages: 24-28

¹ Рost-graduate Student, Stagier-Researcher, MGTU MIREA
² Рost-graduate Student, MGTU MIREA

Keywords: sol-gel method PZT MEMS thickness crystallographic orientation polymers PVP

Abstract

Piezoelectric films with the thickness of 1-10 μm are used in microelectromechanical systems (MEMS). Sol-gel lead zirconate titanate (PZT) film is promising material for MEMS applications due to relatively simple preparation technique, high piezoelectric and electrical properties. However, the layer-by-layer deposition of thick PZT films is a challenge as a result of single layer thickness limitation from 90 to 200 nm. An effect of molecular additives on the thickness and microstructure of sol-gel PZT films is discussed. The main approaches to an increase of PZT film piezoelectric properties by means of enhancing the preferential crystallographic orientation are reviewed.

How to cite

Лавров П.П., Корнюхин А.В. Роль молекулярных добавок в снижении внутренних напряжений в наноструктурных пленках ЦТС, получаемых золь-гель методом // Наноматериалы и наноструктуры - XXI век. 2014. № 1. С. 24–28.

References

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Yu Q. et al. Electrical properties of K0.5Na0.5NbO3 thin films grown on Nb:SrTiO3 single-crystalline substrates with different crystallographic orientations // Journal of Applied Physics. 2013. V. 113. № 2. P. 024101-024101-5.
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Lett M. et al. Single-Crystal Thin Films // Science. 1996. V. 273. P. 903.
Kozuka H. et al. Stress and cracks in gel-derived ceramic coatings and thick film formation // Journal of sol-gel science and technology. 2003. V. 26. № 1-3. P. 681-686.
Yi G., Sayer M. Sol gel processing of thick PZT films // ISAF'92: Proceedings of the Eighth IEEE International Symposium on Applications of Ferroelectrics. 1992. P. 289-292.
Kozuka H. et al. PVP-assisted sol-gel deposition of single layer ferroelectric thin films over submicron or micron in thickness // Journal of the European Ceramic Society. 2004. V. 24. № 6. P. 1585-1588.
Park G.T. et al. Piezoelectric and ferroelectric properties of 1-μm-thick lead zirconate titanate film fabricated by a double-spin-coating process // Applied physics letters. 2004. V. 85. № 12. P. 2322-2324.
Yamano A., Takata K., Kozuka H. Ferroelectric domain structures of 0,4-μm thick Pb (Zr, Ti) O3 films prepared by polyvinylpyrrolidone-assisted Sol-Gel method // Journal of Applied Physics. 2012. V. 111. P. 054109.
Yu S. et al. Effects of poly (ethylene glycol) additive molecular weight on the microstructure and properties of sol-gel-derived lead zirconate titanate thin films // Journal of materials research. 2003. V. 18. № 3. P. 737-741.
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Oh S. M., Do Y. H., Yoon S. J. Fabrication of 1 μm Thickness Lead Zirconium Titanate Films Using Poly (N-vinylpyrrolidone) Added Sol-gel Method // Trans. Electr. Electron. Mater. (TEEM). 2011. V. 12. № 5. P. 222-225.
Choi J. J. et al. Sol-Gel Preparation of Thick PZN-PZT Film Using a Diol Based Solution Containing Polyvinylpyrrolidone for Piezoelectric Applications // Journal of the American Ceramic Society. 2005. V. 88. № 11. P. 3049-3054.
Park G.T. et al. Piezoelectric and ferroelectric properties of 1-μm-thick lead zirconate titanate film fabricated by a double-spin-coating process // Applied physics letters. 2004. V. 85. № 12. P. 2322-2324.
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Law C. W. et al. Effect of pyrolysis temperature on the characteristics of PZT films deposited by the sol-gel method // Thin Solid Films. 1998. V. 335. № 1. P. 220-224.
Park G.T. et al. Orientation control of sol-gel-derived lead zirconate titanate film by addition of polyvinylpyrrolidone // Journal of materials research. 2005. V. 20. № 4. P. 882-888.
Sigov A.S., Vorotilov K.A., Zhigalina O.M. Effect of lead content on microstructure of sol-gel PZT structures // Ferroelectrics. 2012. V. 433. № 1. P. 146-157.

[1] Trolier-McKinstry S., Muralt P. Thin film piezoelectrics for MEMS // Journal of Electroceramics. 2004. V. 12. № 1-2. P. 7-17.

[2] Yu Q. et al. Electrical properties of K0.5Na0.5NbO3 thin films grown on Nb:SrTiO3 single-crystalline substrates with different crystallographic orientations // Journal of Applied Physics. 2013. V. 113. № 2. P. 024101-024101-5.

[3] Du X. et al. Crystal orientation dependence of piezoelectric properties of lead zirconate titanate near the morphotropic phase boundary // Applied physics letters. 1998. V. 72. № 19. P. 2421-2423.

[4] Lett M. et al. Single-Crystal Thin Films // Science. 1996. V. 273. P. 903.

[5] Kozuka H. et al. Stress and cracks in gel-derived ceramic coatings and thick film formation // Journal of sol-gel science and technology. 2003. V. 26. № 1-3. P. 681-686.

[6] Yi G., Sayer M. Sol gel processing of thick PZT films // ISAF'92: Proceedings of the Eighth IEEE International Symposium on Applications of Ferroelectrics. 1992. P. 289-292.

[7] Kozuka H. et al. PVP-assisted sol-gel deposition of single layer ferroelectric thin films over submicron or micron in thickness // Journal of the European Ceramic Society. 2004. V. 24. № 6. P. 1585-1588.

[8] Park G.T. et al. Piezoelectric and ferroelectric properties of 1-μm-thick lead zirconate titanate film fabricated by a double-spin-coating process // Applied physics letters. 2004. V. 85. № 12. P. 2322-2324.

[9] Yamano A., Takata K., Kozuka H. Ferroelectric domain structures of 0,4-μm thick Pb (Zr, Ti) O3 films prepared by polyvinylpyrrolidone-assisted Sol-Gel method // Journal of Applied Physics. 2012. V. 111. P. 054109.

[10] Yu S. et al. Effects of poly (ethylene glycol) additive molecular weight on the microstructure and properties of sol-gel-derived lead zirconate titanate thin films // Journal of materials research. 2003. V. 18. № 3. P. 737-741.

[11] Jia Q. X. et al. Polymer-assisted deposition of metal-oxide films // Nature Materials. - 2004. - V. 3. № 8. P. 529-532.

[12] Du Z.H., Ma J., Zhang T.S. Densification of the PLZT Films Derived from Polymer Modified Solution by Tailoring Annealing Conditions // Journal of the American Ceramic Society. 2007. V. 90. № 3. P. 815-820.

[13] Kozuka H. et al. Crack-free, thick ceramic coating films via non-repetitive dip-coating using polyvinylpyrrolidone as stress-relaxing agent // Journal of Sol-Gel Science and Technology. 2000. V. 19. № 1-3. P. 205-209.

[14] Oh S. M., Do Y. H., Yoon S. J. Fabrication of 1 μm Thickness Lead Zirconium Titanate Films Using Poly (N-vinylpyrrolidone) Added Sol-gel Method // Trans. Electr. Electron. Mater. (TEEM). 2011. V. 12. № 5. P. 222-225.

[15] Choi J. J. et al. Sol-Gel Preparation of Thick PZN-PZT Film Using a Diol Based Solution Containing Polyvinylpyrrolidone for Piezoelectric Applications // Journal of the American Ceramic Society. 2005. V. 88. № 11. P. 3049-3054.

[16] Park G.T. et al. Piezoelectric and ferroelectric properties of 1-μm-thick lead zirconate titanate film fabricated by a double-spin-coating process // Applied physics letters. 2004. V. 85. № 12. P. 2322-2324.

[17] Du Z.H., Ma J. The effect of PVP on the critical thickness and properties of PLZT ceramic films // Journal of electroceramics. 2006. V. 16. № 4. - P. 565-569.

[18] Tyholdt F. et al. Chemically derived seeding layer for {100}-textured PZT thin films // Journal of Electroceramics. - 2007. - V. 19. ? № 4. P. 311-314.

[19] Kobayashi T. et al. Effect of multi-coating process on the orientation and microstructure of lead zirconate titanate (PZT) thin films derived by chemical solution deposition // Thin Solid Films. 2005. V. 489. № 1. P. 74-78.

[20] Gong W. et al. Effect of pyrolysis temperature on preferential orientation and electrical properties of sol-gel derived lead zirconate titanate films // Journal of the European Ceramic Society. 2004. V. 24. № 10. P. 2977-2982.

[21] Jung Kim C., Jong Lee W., No K. Control of preferred orientation in sol-gel lead-zirconate-titanate film on Pt/Ti/glass substrate // Thin solid films. 1998. V. 312. № 1. P. 130-134.

[22] Law C. W. et al. Effect of pyrolysis temperature on the characteristics of PZT films deposited by the sol-gel method // Thin Solid Films. 1998. V. 335. № 1. P. 220-224.

[23] Park G.T. et al. Orientation control of sol-gel-derived lead zirconate titanate film by addition of polyvinylpyrrolidone // Journal of materials research. 2005. V. 20. № 4. P. 882-888.

[24] Sigov A.S., Vorotilov K.A., Zhigalina O.M. Effect of lead content on microstructure of sol-gel PZT structures // Ferroelectrics. 2012. V. 433. № 1. P. 146-157.

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