V.E. Sergeev1

1 FSUE RFNC «All-Russian Research Institute of Experimental Physics» (Sarov, Russia)
1 sergeev1980sergeev@yandex.ru

The progress of modern microelectronics is largely determined by the development of thin-film technologies that make it possible to form new structures with unique properties to create microwave devices.

The values of the output characteristics of the developed microwave devices largely depend on the accuracy of the parameters of the microstrip circuit board elements. The creation of modern radio electronic systems and microwave range devices with increased functional complexity, reliability and lower weight and size parameters requires an increase in the accuracy of the elements of microstrip boards.

Comprehensive studies on surface preparation, vacuum spraying and photolithographic etching using high-resolution photoresist have made it possible to produce microstrip boards with transition metallized holes and a maximum width tolerance of ± 5 microns for topological pattern elements.

The technology has been successfully used to manufacture microwave devices.

Sergeev V.E.  Improving the technology of manufacturing microstrip boards // Achievements of modern radioelectronics. 2026. V. 80. № 8. P. 68–73. DOI: https://doi.org/10.18127/j20700784-202608-09

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