An estimate for the quality factor of a beam microcavity taking into account the multilayer structure of its structure
- 1 Dr.Sc. (Eng.), Professor, Director of Institute of Radio Engineering, Electronics and Communication, Saint Petersburg State University of Aerospace Instrumentation
- 2,3 Ph.D. (Eng.), Associate Professor, Saint Petersburg State University of Aerospace Instrumentation
- 4 Ph.D. (Econ.), Associate Professor, Saint Petersburg State University of Aerospace Instrumentation P.А. Okin - Post-graduate Student, Saint Petersburg State University of Aerospace Instrumentation
Abstract
The paper considers an improved technique for calculating the quality factor of micromechanical resonators used as secondary measuring transducers in MEMS with a frequency-modulated output signal. Based on the solution of the thermoelasticity equation for a given oscillatory system, a temperature distribution in the resonator volume is found, which allows calculating the thermoelastic component of internal friction in the beam and obtaining an improved Q value.
How to cite
Бестугин А.Р., Филонов О.М., Овчинникова Н.А., Киршина И.А. Оценка добротности балочного микрорезонатора с учетом многослойности его структуры // Успехи современной радиоэлектроники. 2018. № 2. С. 46–50.
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