Methods of wavefront quality and surface roughness control of high-precision optics with large apertures
- 1 д.т.н., зав. кафедрой РЛ2, МГТУ им. Н. Э. Баумана
- 2 аспирант, инженер, МГТУ им. Н. Э. Баумана
- 3,4 к.т.н., доцент, МГТУ им. Н. Э. Баумана
Abstract
At the present moment problems of defining and controlling the optical surface quality parameters are a great interest. Creation of several next generation systems with peak performance challenged to manufacture large aperture optical details with principally new requirements to the parameters of the optical surface wavefront and roughness. These parameters define overall performance of technical systems.
However the requirement of strengthening the optical surface profile of current optical-electronic systems dictates the developing of interferometric control methods. Present instruments should be able to give precise measurements and also take precise measurements in the presence of vibrations and motions.
Key features of schemes and methods of the interferometric control of high-precision optics are presented in the paper. They are connected with the methods of estimation of the quality of the optical surfaces, problems of the vibration immunity; building of the interferometric control scheme based on the interferometer Intellium H2000 (ESDI) and developed optical collimator; estimation of the scheme errors and schemes of calibration for error correction. Solution of these problems would make possible to develop instruments for precise control of the large aperture optical surfaces.
How to cite
Барышников Н.В., Гладышева Я.В., Денисов Д.Г., Животовский И.В. Методы контроля формы и качества поверхностей крупногабаритных высокоточных оптических элементов // Успехи современной радиоэлектроники. 2014. № 4. С. 48–52.
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