The micro - and nanoelectromechanical resonators - functional components of perspective systems of signal processing

A.R. Bestugin; O.M. Filonov; I.A. Kirshina

The micro - and nanoelectromechanical resonators - functional components of perspective systems of signal processing

A.R. Bestugin¹, O.M. Filonov², I.A. Kirshina³

research article Pages: 42-44

¹ Dr.Sc. (Eng.), Associate Professor, Director, Institute of Radio Engineering, Electronics and Communication
² Ph.D. (Eng.), Associate Professor, Department «Micro and Nanotechnologies of Space Instrument Making», FGAOU VPO St. Petersburg State University of Space Instrument Making
³ Ph.D. (Econ.), Associate Professor, Department «Micro and Nanotechnologies of Space Instrument Making», FGAOU VPO St. Petersburg State University of space instrument making

Keywords: micro and nanoelectromechanical systems micro and nanoresonators bladed resonators frame resonators console dimensional factors elasticity module

Abstract

Results of researches of micro and nanoelectromechanical resonators of GHz range are given. The problems connected with development of theoretical models of these devices, dimensional factors considering influence are analysed. Problems of a determinirovaniye of fluctuations of resonators for the subnanometer range of amplitudes are considered. The assessment of applicability of existing technical means as secondary measuring converters in MEM and NEM resonators is carried out.

How to cite

Бестугин А.Р., Филонов О.М., Киршина И.А. Микро - и наноэлектромеханические резонаторы - функциональные компоненты перспективных систем обработки и передачи сигналов // Успехи современной радиоэлектроники. 2014. № 12. С. 42–44.

References

Filonov O.M., Kirshina I.A., Okin P.A. Osobennosti proektirovanii chuvstvitel'nyh jelementov MJeMS s rezonansnymi izmeritel'nymi preobrazovateljami // Fundamental'nye i prikladnye issledovanija v sovremennom mire: IV Mezhdunar. nauch.-prakt. konf. Dek. 2013. Sankt-Peterburg. 2013. S. 37-39.
Bestugin А., Filonov О.M., Kirshina I.A., Okin P.A. Operated change of mechanical properties of silicon at its alloying // European science review. May-June. № 5 6/2014. P. 43-46.
Li X., Ono T. Study on Ultra - thin NEMS cantilever - high yield fabrication and size effect on Young-s modulus of sili-con / Micro Electro Mechanical System. The Fifteenth IEEE International Conference. 2002.

[1] Filonov O.M., Kirshina I.A., Okin P.A. Osobennosti proektirovanii chuvstvitel'nyh jelementov MJeMS s rezonansnymi izmeritel'nymi preobrazovateljami // Fundamental'nye i prikladnye issledovanija v sovremennom mire: IV Mezhdunar. nauch.-prakt. konf. Dek. 2013. Sankt-Peterburg. 2013. S. 37-39.

[2] Bestugin А., Filonov О.M., Kirshina I.A., Okin P.A. Operated change of mechanical properties of silicon at its alloying // European science review. May-June. № 5 6/2014. P. 43-46.

[3] Li X., Ono T. Study on Ultra - thin NEMS cantilever - high yield fabrication and size effect on Young-s modulus of sili-con / Micro Electro Mechanical System. The Fifteenth IEEE International Conference. 2002.